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Seki Diamond SDS 5000/6000 Series
Description：
Key Specifications
High-power density plasmas
— accelerated growth ratesOptical grade,
highest quality microcrystalline diamond (2” diameter)Various thermal grade,
high growth rate microcrystalline diamond (2” diameter)Single-crystal diamond
— high growth rate and device qualityCategory
Features
01
Important Highlights
- Low- to high-power density plasma for accelerated diamond CVD growth rates
- Flexible configurations for demanding polydiamond and single crystal processes
- Stainless, cold-wall chamber
- Heated (@1.5kW) and/or Water cooled stage (@5kW)
- Multiple ports for plasma viewing and in-situ diagnostics, load-lock capable
- Range of models available for recipe-driven computer control and manual operation
- Pressure Operation Range: 10-200 Torr
02
Application
- High-power density plasmas — accelerated growth rates
- Optical grade, highest quality microcrystalline diamond (2” diameter)
- Various thermal grade, high growth rate microcrystalline diamond (2” diameter)
- Single-crystal diamond — high growth rate and device quality
03
Series Information
The Seki Diamond SDS 5000/6000 Series is a high-performance family of high-reliability, high-repeatability reactors that provide a range of capabilities to fit your needs:
- SDS 5200S — 1.5kW, heated stage, touch-panel GUI with manual control
- SDS 5250S — 5.0kW, cooled stage, touch-panel GUI with manual control
- SDS 6300 — 1.5kW, heated stage, computer recipe operation with data logging
- SDS 6350 — 5.0kW, cooled stage, computer recipe operation with data logging
